SiC semiconductor evaluation device "SemiScope"
SiC semiconductor evaluation device using photoluminescence (PL) imaging method
"SemiScope" is a PL imaging device that can measure photoluminescence (PL) images with a resolution of less than 1μm. By using a tiling function that allows imaging measurements while moving the sample, it is possible to obtain PL images of the entire 6-inch wafer with a resolution of approximately 3.3 billion pixels. It visualizes crystal defects in SiC wafers. Non-contact and non-destructive testing can be performed quickly using the PL imaging method. 【Features】 - SiC semiconductor evaluation device - Visualization of crystal defects in SiC wafers - Non-contact, non-destructive testing - Short measurement time possible due to PL imaging method For more details, please contact us or download the catalog.
- 企業：フォトンデザイン
- 価格：Other
